What version are you using? You should definitely use latest 0.92 in your case. It has 64 bit integer support so you do not get rounding errors with higher resolutions.
On the other side, it is the same position computation as for the outline, so there is no difference to expect.
Have you created a height map, to see error distribution?
Yesterday 0.92 version also has a bump map correction, that might come usefull to eliminate last 0,05mm error. Just call G29 when configured to create and use the bump map.